With the emergence of Industry 4.0, the use of advanced technologies has become widespread in both the manufacturing and service sectors. Among the most important of the advanced technologies used are cyber physical systems (CPS). Along with the use of technology, security has also become highly important. For this reason, along with CPSs, the issue of cyber security has also developed. For this purpose, in this study, bibliometric analysis of 827 studies published between 1999-2021 in the field of CPS and cyber security in journals scanned in Web of Science was performed. With the thematic evolution analysis, the change in the field has been revealed based on time. While the basic elements of cyber security issues were discussed in the period of 1999-2015, which was determined as the first period, issues such as smart grids and education were observed in the period of 2016-2019, which was determined as the second period. In the last period of 2020-2021, topics such as cloud computing, game theory and maritime cyber security have emerged. However, there are also CPSs and cyber security concepts that exist in all three periods. From this point of view, it can be concluded that the field of CPS and cyber security is not yet fully mature and more detailed studies are needed on basic issues, while interdisciplinary studies are expected to gain weight in the coming days, as it is a subject that has an impact on many different dimensions.