Özet:

This article offers the work of an electrothermal micro-activator produced using two-foton polimerization (2PP), one of the 3B micro-added production methods. The electrothermal micro-activator, which can move in two directions, has been designed and manufactured according to the defined criteria. Three experiments were conducted during the manufacturing process. During the production process of the first 2 experiments, micro-actutors were deteriorated and broken. These problems did not occur during the production process of the 3rd experiment. The experiments conducted show the impact of support structures on the production of micro-activators. A characterization arrangement has been created to observe the micro-activator changes under different working voltage values. For the characterization process, the micro-actor connected to the prob station is connected to a circuit card with cable connected to the electric pads. A installation with an optical microscope and digital camera was used to observe locations in the Prob station. Image processing algorithm has been developed to identify the localization of the micro-activator as a result of the characterization processes. Working voltage was increased by 1V increases from 0V to the micro-actor structure with breakdowns and disturbances observed. The activator is able to resist fraction and deterioration up to 7V voltage. At 8V voltage there were fractures in the arms of the micro-actor. The maximum location change was measured at 2.82 μm. As a result, the maximum movement of the micro-activator is 5. It was found at 64 μm.

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