Diffraction efficiency of grating, created by hot imprint process on the surface of polycarbonate is one of the parameters, which determines the quality of microstructure. Gratings are created by using hot imprint process with and without high frequency excitation and during the quality investigation, diffraction efficiencies were measured on purpose to find microstructure of best possible optical quality, as well determine whether high frequency excitation and other process parameters during the process affect this parameter. Process parameters include: temperature, excitation frequency, force of mechanical load and duration of hot imprint process, the purpose is to determine the collection of parameters, which influences the diffraction efficiency most positively. Paper discusses production of diffraction gratings and method of investigation of diffraction efficiency after all this results of this investigation are being presented and generalized.
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