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Günümüzün popüler konularından olan ince film akıllı alaşımlar, her geçen yıl ihtiyaç ölçüsünde daha da küçülen mikro elektromekanik sistemlerdir. Bu alaşımlardan NiTi ince film, sahip olduğu termoelastik özellikler sayesinde yaygın olarak tercih edilmektedir. Depolanan bu filmlerin fiziksel özelliklerinin anlaşılabilmesi için birçok karakterizasyon yöntemi mevcuttur. Bu çalışmada silikon altlık üzerine depolanmış Nikel-Titanyum ince filmin faz dönüşümü sıcaklığa bağlı X-Ray kırınımı ile incelenmiştir. İncelenen sıcaklık aralığı -125°C ile 125°C olarak alınmıştır. Stokiyometrik olarak birbirinden farklı iki NiTi örneği (oda sıcaklığında biri austenit diğeri martensit oranları daha yüksek olan) incelenmiş ve her bir filmin faz dönüşüm sıcaklıkları (austenit başlangıç ve bitiş, martensit başlangıç ve bitiş) tespit edilmiştir. Direkt karşılaştırma yöntemi kullanılarak işlem esnasındaki martensit hacim oranı sıcaklığa bağlı olarak elde edilmiştir.
Thin film intelligent alloys, one of today’s popular topics, are microelectromechanical systems that are increasingly reduced by the need each year. From these alloys, NiTi thin film is widely preferred thanks to its thermal elastic properties. There are many characterization methods available to understand the physical characteristics of these stored films. In this study, the phase conversion of the Nikel-Titanium thin film stored on the silicone substrate was studied with the temperature-related X-ray breakdown. The reviewed temperature range was taken between -125°C and 125°C. Two different NiTi examples were studied by stokiyometry (one with a higher austenite and another martensite rate at room temperature) and the phase conversion temperatures of each film (austhenite start and end, martensite start and end) were identified. By using the direct comparison method, the volume rate of martensite during the process is obtained depending on the temperature.
Thin film shape memory alloy which is strongly relevant with the fabrication of the micro electro mechanical systems is one of the hot research topic in last decades. Among the investigated shape memory alloys, NiTi is stepping forward by the thermos-elastic features it has. In order to understand their physical properties, several characterization methods have been used by the researchers. In this study, a NiTi thin film that is deposited on a Si substrate is characterized by an X-Ray Diffraction under gradually evolving testing temperatures. The examination is performed between -125°C and 125°C. Two stoichiometrically different samples (at room temperature, one of them is martensite rich and the other is austenite rich) are tested and the phase transformation temperatures are determined (martensite and austenite start and finish temperatures) during the experiments. Furthermore, by using the direct comparison method, the martensite volume fraction is determined with regard to temperature. several characterization methods have been used by the researchers. In this study, a NiTi thin film that is deposited on a Si substrate is characterized byseveral characterization methods have been used by the researchers. In this study, a NiTi thin film that is deposited on a Si substrate is characterized by
Alan : Fen Bilimleri ve Matematik; Mühendislik
Dergi Türü : Ulusal
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