Özet:

An improved single-π circuit model for spiral inductors on lossy silicon substrate is proposed. In this model, the lateral resistance and inductance of substrate are introduced to model the eddy-current losses induced by magnetic coupling between the spiral and the substrate. And FastHenry method is used to extract the inductances of spiral, substrate, and the mutual inductance between them, which can efficiently capture the proximity and skin effects in metal tracks and the substrate coupling. The examples of two typical spiral inductors fabricated in CMOS technology is presented to illustrated the accuracy and efficiency of the model. The model shows excellent agreement with the measure results at the frequency from 100MHz to 10GHz.

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