Özet:

This paper presents a mathematical model to describe the 2 θ in-plane response of supported ring-based MEMS Coriolis Vibrating Gyroscopes (CVGs), including mechanical non-linearity in ring and support structures. Whilst it is well-known that the drive mode resonance frequency of unsupported rings depends on drive amplitude, the proposed model investigates the effects of support geometrical non-linearity on the dynamic behaviour of the 2 θ modes. Results indicate that the non-linear stiffness of the supports, combined with the ring non-linearity, breaks the rotational symmetry of the resonator when 8 supports are used, leading to a reduction in sensor gain. In contrast the symmetry of the resonator and performance are maintained when 16 supports are used. The proposed model also demonstrates how the mechanical support non-linearity can be used to guide the design of resonators having a linear drive mode frequency backbone curve.

Anahtar Kelimeler: