Özet:

Optical micro-ring resonator (MRR) sensors are an emerging technology that attracts attention not only because it’s small footprint but also because of its high-quality features. In this work, a Silicon on Insulator (SOI)-based MRR sensor is studied for a practical label-free sensor. After the analysis of this study, it is found that a smaller (compare to previous studies) label-free optical sensor with a sensitivity of 206nm/RIU and a q-factor of 17900 can be obtained when the optimal designed parameters are used. Thus, it is believed that, this work would shed a light on optical sensor technology for more compact-efficient, low-cost and complementary metal-oxide-semiconductor (CMOS)-compatible sensors for daily life usage.

Anahtar Kelimeler: