Abstract:

Titanium-nickel films have an increasing interest and an increasing potential use in recent years thanks to their shape memory properties and super elasticity properties. Titanium-nickel films grown by magnetron sputtering method have amorphous internal structure. In order to give shape memory and super elastic properties, these films are heat treated and the internal structure is transformed into crystal phase. In this study, titanium-nickel films grown by magnetron sputtering method were subjected to heat treatment in an atmosphere controlled tube furnace at six different temperature values. Phase changes of the films were determined by XRD analysis, micro structures were observed by SEM images and phase transformation temperatures determined by DSC analysis. As a result of the study, it was determined that different heat treatment temperatures greatly changed the internal structure. According to the results, it was determined that the heat treatment at 550 ° C was suitable for TiNi applications at room temperature.

Keywords: