Özet:

Precise microstructures find their application in various areas: laser industry; electronic, microfluidic devices. There are several processes for production of precise periodic microstructures. One of these processes is hot imprint, on the other hand there are many challenges, related with quality of microstructure. One of the solutions for the quality issues is exploitation of ultrasonic excitation during the process of mechanical hot imprint. In the paper analytical measures and analysis algorithms for the measurement of quality parameters of already created microstructure, as well for dynamic analysis of created vibroactive pad are presented. In the end of the paper vibroactive pads are experimentally analysed using already discussed equipment and measuring algorithms, in order to find out their operating frequencies.

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