Abstract:

This article offers the work of the final elements of the electrothermal micro-actor based on the microelectromechanical system (MEMS) designed with the COMSOL software. Electrothermal actors provide larger space changes compared to electrostatic actors. Thermal actors are two types. Bimorf thermal activator and electrothermal compatible (ETU) activator made of single material. Bimorf actors are composite structures made of two or more different materials. In this study, the ETU type thermal activator was used. The micro-activator, which can move in two directions, is designed according to the defined criteria and analyses are carried out. Polycrystalline silicone material assignment, which is the conductive feature of the micro-actor for the analysis of the final elements, has been made. This analysis is of great importance before the processes of manufacture and characterization of the micro-actor. In the process of analysis, the micro-activator is moved by applying the voltage. Working voltage has been increased by 1V increases from 0V to micro-actor structure breaks and disturbances observed. The micro-actor can bear up to 5V voltage. After this voltage value, there were fractures and deteriorations in the structure of the micro-activator. The results of the analyses were measured to 4.18 μm when the maximum place change was 5V voltage applied. As a result, the electrothermal micro-activator design is double-directional and the maximum space change has been identified as 8.36 μm.

Keywords: